Methods for the production of fine particles which are suited for electronmicroscopic observation are briefly introduced. The usefulness of the ultra-high resolution electron microscopy for the study of fine particles is emphasized, in particular, in looking into the details of crystal structures, crystalline defects, morphologies and surface structures of small particles. As some examples, structural changes of metal clusters less than 100 Å in size which are caused by the electron beam irradiation in the microscope, structural details of spherical particles of Si and alumina, and surface coatings of small particles by carbon, are described.
