イオンスパッタ中における金属表面の連続SEM観察

抄録

A continuous observation of the metal surfaces has been performed by using a SAM (scanning Auger electron microscope, an Auger version of SEM) to study the ion sputtering phenomena, such as preferential sputtering, a cone formation, and other morphological changes. A 16-mm movie technique and a particular time sequence method for the ion sputtering were introduced to the SAM system. Some applications of the technique to the pure metals (Cu) and alloys (Cu-Sn and Pb-Sn) are demonstrated. It was found that some phenomena characteristic to the ion sputtering can be revealed only with this technique.