抄録
The purpose of this study is to establish product structures and their manufacturing methods that improve the adhesion between quartz glass substrates, which have an extremely small coefficient of thermal expansion, and ceramic sprayed coatings with thickness over 300 μm. This study was investigated using the following two methods. First, a material for a base layer that has high adhesion to the quartz glass was selected, and we found that a dense Yttria (Y2O3) sprayed coating effectively functions as a buffer layer. Second, the strength of blasted quartz glass substrates decreases by the influence of a fracture layer, but we founded that the fracture layer could be repaired by applying appropriate heat treatment to blasted substrates. It was confirmed that such a treatment further improves the adhesion between the Y2O3 coating and the quartz glass. The product structures established in this study allow the ceramic sprayed coatings to be removed without damaging the substrates by applying a self-supported film manufacturing method. Therefore, the quartz glass substrate can be reused without being discarded, and by repeatedly recoating the protective film, it will be possible to realize circular manufacturing, which is a circular business related to the 3Rs (Reduce, Reuse, and Recycle)
