抄録
An air flow transports and diffuses the contaminant which is generated in a room. So it is necessary to comprehend the air flow pattern in a room, in order to control cleanliness of a clean room. A laser light sheet(LLS) and fine magnesium carbonate powder were adopted as the light source and the particle tracer respectively. The scattering light of tracer particles was taken into picture and the turbulent flow in the room was analyzed. The air flow patterns in various types of clean Room models with various numbers of supply outlets were analyzed, the basic design data were obtained. Those data will be useful for controlling the contaminants distribution in a conventional flow type clean rooms.
