抄録
With liquid crystal and semiconductor device being refined and highly integrated, it is now inevitable to develop super precision cleaning techniques. Such a new technique is suggested to remove adhered fine particles by means of applying the impact force of droplets made to collide at high speed onto the surface of an object to be cleaned.
This report is concerned with a supersonic mixing nozzle of fine fluid particles. First of all, the characteristics of a supersonic flow were visualized by the Schlieren method for the case of air only, and clarified changes in image due to the difference in the lighted time. Then, a cone was put in a supersonic flow, the flow velocity was measured from the Mach angle of the oblique shock wave generating from the cone tip. The velocity of fluid particles mixed with a supersonic flow was measured by the laser Doppler velocimeter and the particle diameter was estimated by measuring the pedestal height of Doppler signal. Furthermore, the total temperature of supersonic flow was tried to measure by thermocouple.
