A218 種々の用途に対する超高速・超高感度撮像素子の仕様の集約

抄録

The authors have developed image sensors for vide cameras with the maximum frame rate more than 1, 000, 000 fps (frames per second). They also have designed an image sensor, the PC-ISIS, Photon-Counting In-situ Storage Image Sensor, with the ultra-high frame rate and the ultra-high sensitivity close to the photon-counting sensitivity as well, which is under preliminary evaluation. The sensor is based on the innovative structures for the ultra-high performance, such as the ISIS structure for the ultra-high frame rate, and the CCM, Charge Carrier Multiplier, together with the backside illumination and cooling for the ultra-high sensitivity. Once the performance of the PC-ISIS is confirmed, some derivatives of the sensor that have also ultra-high performance can be designed for various scientific and engineering applications by using the structures and the process applied to the PC-ISIS. A cooperative research project is proposed to search for the possible applications and to prepare the specific designs for the various applications.