抄録
Formation mechanism of a crack and pore occurred in zirconia electrolyte film having solid oxide fuel cell, that the film prepared by the microwave plasma-enhanced chemical vapor deposition, was studied based on dependence on annealing treatment and substrate temperature. It is found that a crack and pore is restrained at annealing treatment in a vacuum, although it occurs in atmospheric. A crack is formed at grain boundary by occurrence of pore in the film, and a large crack observes at a higher substrate temperature. Moreover in the film prepared without substrate heating, a crack and pore did not also occur at annealing treatment. As a result, it is supposed that formation of a crack and pore is occurred at getting oxygen gas or moisture in atmospheric into the film.
