抄録
We evaluated the sliding friction coefficient under changes of load from 0.98 mN to 196 mN at pressures of 105 Pa and 10-5 Pa. The friction of type 304 austenitic stainless steels as typical vacuum materials was measured, and surface roughness of nano order was prepared by electrochemical buffing and chemical etching. The same value of friction coefficient on samples measured in a vacuum as at atmospheric pressure when surface roughness was prepared to about 40 nm to 1.2 μm was also found. There is an absorption force of about 20 mN on a sample with a surface roughness of less than about 670 nm at atmospheric pressure. In a vacuum, a sample with a surface roughness under 40 nm also showed adsorption force below 0.98 mN, while a sample with a surface roughness around 100 nm showed higher adsorption force of about 15 mN. It was concluded that there was a range of surface roughnesses without any decrease in adsorption force even in a vacuum.
