Abstract
Energy loss spectra and angular distributions of 610 keV protons scattered on the (001) surfaces of the ion crystals are measured. The angle of incidence of protons is smaller than 13 mrad. The surfaces have been in-situ irradiated uniformly and the other nonuniformly so that its upstream side for the incident protons is removed preferentially. The surface damages created by the irradiation are observed by an atomic force microscopy (AFM) in air. With increasing the irradiation dose, the energy losses and the peak angles of scattering of the scattered protons are plotted. The results depend largely on the distribution of damages, and are compared with calculated results by a computer simulation. It is found that the change of the angular distributions depends not only on the distribution of damages but also on the angle of incidence of protons to the surface.