真空技術
Online ISSN : 1883-7182
ISSN-L : 1883-7182
チタニウム蒸発ポンプについて
岡野 純
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ジャーナル フリー

1953 年 4 巻 4 号 p. 201-213

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Characteristics of a new type of high vacuum pump, called evapor-ion pump which was reported recently by Herb and his co-workers, was studied.The end-vacuum of the pump which was constructed by glass, was 0.62×10-6mmHg and the rate of the consumption of titanium was 1020mg/hr.for the pumping speeds of the order of 1l/s.By the ionyation of the gas the pumping speed for air was increased by several times.

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