オージェおよびイオン化ロスピークを利用した蒸着膜成長モードの決定

抄録

Growth mode of the iron films deposited on MgO (001) surfaces with and which contamination was studied on the basis of Palmberg's criterion. The deposition rate of the films was controlled about 1.2 Å min^-1 and the residual gas pressure during the deposition was kept lower than 2 × 10^-10 Torr. For the application of the criterion to the growth mode analysis, the change of several Auger peak heights of the substrate and the deposit should be measured with the amount of deposition. Some of the Auger peaks, Mg (KLL), Mg (LVV), and Fe (M_{2, 3}M_{4, 5}M_{4, 5}), are, however, not suitable for the purpose because they are disturbed by the experimental difficulties. The energy differences among O (KLL), Fe (L₃M_{2, 3}M_{2, 3}), Fe (L₃M_{2, 3}V), and Fe (L₃VV) peaks are insufficient for the purpose. Therefore, in this study, Fe-L₃ shell ionization loss peak was used in addition to the Auger peaks. The films deposited on a contaminated surface seemed to grow through island structure, and those deposited on a carefully cleaned surface seemed to grow through layer by layer fashion.