When deposits condense on a substrate, the growth behaviour of such a case is first numerated by Seah (Surface Sci. 40 (1973) 595). In this growth mode, AES signals from deposits and substrate can be calculated as a function of a film thickness. The difference between a monolayer overgrowth and a condensation (or a statistical growth) mode is compared for the case of Ag deposition on Ni. The method of the calculus is also applied for the case of an island growth mode. The result explains quite well the experiments.

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Auger electron spectroscopy has been applied to the study of the aluminium diffusion into amorphous silicon nitride film (which contains a few atomic percents of impurity oxygen) on silicon dioxide. By heat treatment at 500°C for 30 min, aluminium is found to diffuse into the depth of 300Å, where the concentration becomes below 5 × 10¹⁹ atoms/cm³. The activation energy of the diffusion and the diffusion coefficient are 2.0 eV and 7.3 × 10^-3 cm²/sec, respectively. The KLL-aluminium Auger spectrum and the in-depth profile of impurities indicate that the migration of aluminium is dominated by the volume diffusion which involves the reaction of aluminium and oxygen.

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Growth mode of the iron films deposited on MgO (001) surfaces with and which contamination was studied on the basis of Palmberg's criterion. The deposition rate of the films was controlled about 1.2 Å min^-1 and the residual gas pressure during the deposition was kept lower than 2 × 10^-10 Torr. For the application of the criterion to the growth mode analysis, the change of several Auger peak heights of the substrate and the deposit should be measured with the amount of deposition. Some of the Auger peaks, Mg (KLL), Mg (LVV), and Fe (M_{2, 3}M_{4, 5}M_{4, 5}), are, however, not suitable for the purpose because they are disturbed by the experimental difficulties. The energy differences among O (KLL), Fe (L₃M_{2, 3}M_{2, 3}), Fe (L₃M_{2, 3}V), and Fe (L₃VV) peaks are insufficient for the purpose. Therefore, in this study, Fe-L₃ shell ionization loss peak was used in addition to the Auger peaks. The films deposited on a contaminated surface seemed to grow through island structure, and those deposited on a carefully cleaned surface seemed to grow through layer by layer fashion.

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