抄録
Using a turbo-molecular pump with conflat seal flange, a UHV system is designed. In this system, after bakeout of 200°C, 20 hours, ultimate pressure is 1.4×10-10 Torr. Following the bakeout process, with operation of titanium sublimation pump, the pressure of the system is lowered to 4.5×10-10 Torr. Residual gas analyses of the system are also carried out. In this paper, the method for achieving of more lower pressure is discussed.
