Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
An Apparatus for Molecular Beam Deposition
Akira KAWAZUYoshio SAITOGoroh TOMINAGA
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1977 Volume 20 Issue 7 Pages 247-252

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Abstract
An apparatus consisting of two main parts has been constructed for molecular beam deposition. One part of the apparatus, intended for the studies of growth kinetics and crystal structure, is equipped with shelves (on which several substrates are placed), Knudsen cells, a cryostat and a quadrupole mass spectrometer. The other part, which is intended for the measurement of electrical properties, is equipped with a cryostat, point-probes and a magnet. The substrates can be smoothly transferred from the shelves to cryostats, because ball bearings are used and the surfaces of the movable parts are coated with Au by ion-plating.
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© The Vacuum Society of Japan
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