2元真空蒸着法による非晶質CoFe₂O₄膜の作成および組織

抄録

Amorphous cobalt ferrite films were prepared by the dual source evaporation method adopting CoFe₂ alloy and P₂O₅ as the starting materials. The films were made under various levels of pressure of evaporated P₂O₅ (P_P2O5) and the maximum perpendicular magnetic anisotropy constant, 8 × 10⁴ J/m³, was obtained at P_P2O5= 1.3 Pa. The observation of SEM showed that the films were composed of the oriented texture with a fine columnar structure, which was presumed the cause of the large magnetic anisotropy. The binding energies of Co, Fe, P and 0 of the film were measured by ESCA and it was found that a small amount of nonreactive oxides of Co and Fe were still extant and also the existence of phosphorus oxides with P³⁺ and P⁵⁺. The measurement of broad Mossbauer spectrum could be assumed that the films have a complex magnetic structure.