Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
The Maintenance of Bearing of Turbo Molecular Pump by the Measurement of Vibration Acceleration
Setsuo NAKAO, Kazuo SAITOH, Masami IKEYAMA, Hiroaki NIWA, Seita TANEMURA, Yoshiko MIYAGAWA, Soji MIYAGAWA
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1994 Volume 37 Issue 8 Pages 634-638

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