Thin films of yttria stabilized zirconia (YSZ) for solid oxide fuel cells (SOFCs) were prepared in reduced pressures from 1.3 to 6.7 Pa and substrate temperatures from room temperature to 500°C on Si (100) substrate by RF magnetron sputtering. Sputtered films were found to be zirconia films orientated from the tetragonal (101) to tetragonal (111) phases and grown in a columnar structure, with increased substrate temperature and deposition pressure. Furthermore, when the film was annealed at 1000°C, zirconia with a tetragonal phase was also found to transit YSZ with a cubic phase.
