高周波スパッタリング法によるNi-イットリア安定化ジルコニアサーメット燃料極を用いた薄膜固体酸化物燃料電池の特性
2003 年 46 巻 6 号 p. 524-528
詳細
2003 年 46 巻 6 号 p. 524-528
Solid oxide fuel cell (SOFC) having a thin yttria stabilized zirconia (YSZ) electrolyte film was prepared on the anode electrode of a porous Ni-YSZ cermet substrate by the RF magnetron sputtering growth. The constitutional YSZ films were characterized based on dependence on the substrate temperature and sputtering time. A thin YSZ film grown at substrate temperature of 400°C indicated a crystal structure similar to the bulk electrolyte one by the diffusion growth in the film and conductivity of the film also increased with increasing substrate temperature. Terminal voltage at 1000°C of an SOFC having thin YSZ film with 9 decreased with operating time, because YSZ electrolyte was deformed to crystal structure with many pores by the thermal energy of the operating temperature.
