速報
二段式流量分配法による分圧真空計の校正サービス
2008 年 51 巻 3 号 p. 109-111
詳細
2008 年 51 巻 3 号 p. 109-111
The calibration service for partial pressure analyzers (PPA) has been carried out from April in 2007 at NMIJ/AIST using a two-stage flow-dividing system. The pressure range is from 10-6 to 10-4 Pa and the test gases are N2, Ar, He and H2.
Results of the calibration for two types of PPA were also shown. The sensitivities of both PPAs were almost constant in the pressure range from 10-6 to 10-4 Pa, while they changed significantly with pressure higher than 10-4 Pa. The calibration uncertainties mainly caused by the instability of PPA indication were about 7% (confidence level 95%). The stability of sensitivities of both PPAs was in about 15% for 7 months.
