Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
研究
軸対称透過形電離真空計の感度係数のばらつきと安定性
高橋 直樹湯山 純平辻 泰荒川 一郎
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ジャーナル フリー

2008 年 51 巻 6 号 p. 377-381

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  The deviation of the sensitivity factors for the axial-symmetric transmission gauge (AT gauge) were examined and compared with those for the B-A gauges and the extractor gauges. The calibrations were performed against nitrogen. The deviations for three types of gauges were about ±10%, nearly the same one another. The long-term variation of the sensitivity factor for two AT gauges was also examined. For one sensor, the sensitivity factor decreased 10% during initial two years operation while the factor stabilized within ±3% for the successive three years. The temperature dependence of the sensitivity factor is discussed for the data obtained in the stabilized period.
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© 2008 一般社団法人日本真空学会
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