Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
研究
四極子形質量分析計のイオン源グリッド表面から放出された電子励起脱離イオン:脱離イオン種と圧力依存性
高橋 直樹辻 泰荒川 一郎
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ジャーナル フリー

2008 年 51 巻 8 号 p. 563-568

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  The pressure dependence of the electron stimulated desorption (ESD) ions were investigated by the quadrupole mass spectrometer with a Bessel-box type energy analyzer. The mass spectra of the ESD ions were measured under introduction of H2O, CO, O2 and CO2. The ESD ion peaks for those gasses were observed at O+ (m/z=16). The mass spectra of the gas phase ions were also measured and compared with those of ESD ions during the pumping down process. The origin of the main species in ESD ions, O+, was the adsorbed H2O on the grid surfaces.

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© 2008 一般社団法人日本真空学会
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