Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Review
Recent Progress in the Transparent Conducting Oxide Thin Films
Mamoru MIZUHASHI
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2008 Volume 51 Issue 9 Pages 599-601

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Abstract

  An overview on the recent progresses in transparent conducting oxide thin films of In2O3, ZnO and TiO2 concludes with a proposal that encourages the re-examination of the action and reaction of dopants with the host lattice in order to establish the deposition conditions that suppress the formation of undesirable defects in terms of carrier generation and mobility enhancement.

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© 2008 The Vacuum Society of Japan
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