Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
アルミニウムアノード酸化皮膜の構造と成長機構および真空中でのガス放出特性
小野 幸子
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ジャーナル フリー

2009 年 52 巻 12 号 p. 637-644

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抄録
  Fundamentals and recent research development of the structure and growth mechanism of anodic oxide films formed on pure aluminum and aluminum alloys such as A5052 and A6061 were described with focusing on their gas emission property in use of vacuum chambers. Highest volume gas emitted from anodized aluminum surface is water vapor followed by oxygen in the second. Notable suppression of gas emission from aluminum alloy surface can be attained by giving porous/barrier composite anodizing films based on the decrease in defects formation in the films.
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© 2009 一般社団法人日本真空学会
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