Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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キャピラリーアレイを用いたガスドーズにおける問題点
杉本 敏樹岡野 達雄福谷 克之
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2009 年 52 巻 3 号 p. 141-144

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  We have developed a Micro-Capillary-Array (MCA) Beam Doser in order to dose a collimated molecular beam. Whereas the response of the chamber pressure was fast in the dosage of N2, D2 and Ar, the pressure response to the NO dosage was slow with a delay of about 5 s. When gases pass through an MCA with a large length to radius ratio as a free molecular flow, they repeatedly collide with the MCA walls. It was found that gases that have a small residence time (τ) pass through the MCA without substantial delay. On the other hand, those with large τ reveal a delayed flow, and it takes a few seconds to attain a steady-state flow.

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© 2009 一般社団法人日本真空学会
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