Abstract
Several new vacuum components have been developed for the XFEL/SPring-8 project. Vacuum waveguide flanges were successfully developed. These flanges provide both RF seal and vacuum seal. The vacuum seal mechanism of these flanges can make seal completely even with a deep scratch on the gasket. Solid-lubricated clean bolt and nut were developed for this flange to avoid organic dust pollution in the vacuum that induces RF discharge. A small RF contact for 28 mm inside diameter bellows was developed. This free ends structure RF contact can move freely in all directions and realize large displacement. The vacuum system of in-vacuum type undulator that commonly used in the accelerators is also described briefly.
