高周波非平衡プラズマ中の微粒子の計測と制御

抄録

  Fine particles generated in plasma travel complicatedly in the plasma by various forces. Generation, transport and wall deposition of fine particles are known to cause particulate contamination problems in many situations of plasma processing. It is therefore important to clarify and evaluate the behavior of particles suspended in plasma. The most useful tool to measure particles in plasma is to detect light scattered by the particles. In this article, studies on the application of laser light scattering methods to the observation, measurement and control of fine particles in a radio-frequency plasma field are introduced.