Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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拡散方程式の定常解に基づく分子流コンダクタンス値
松田 七美男佐藤 吉博齊藤 芳男
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ジャーナル フリー

2010 年 53 巻 3 号 p. 151-153

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  In this report we derive approximation of the transmission probability K for a cylindrical pipe which is usually given with computational calculation by using Monte Carlo technique nowadays, with rather old fashioned diffusion theory. Same results as Dushman's approximation is given based on the stationary solution of the one-dimensional diffusion equation with adopting the special boundary condition, that is the boundary of Dirichlet condition n=0 (n: number density of molecules) placing at the outer side of the real boundary (exit of the pipe). Transmission probability of the serially connected cylindrical ducts of different size is also given by those theory of diffusion.
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© 2010 一般社団法人日本真空学会
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