Abstract
We developed the equipment that measured the recombination coefficient of the atomic oxygen from heat balance of the temperature sensor referring to the method of measuring the recombination coefficient of the atomic hydrogen1).
We added the following two improvements to the method for calculating the recombination coefficient of hydrogen1): Firstly, to suppress the influence of thermal radiation from a plasma radiation source as much as possible, we set the sensor to the position that the sensor was not exposed to the radiation from plasma directly. that the sensor Secondly, we made it possible for sensors to measure higher temperatures in some areas. The source of the oxygen radicals was microwave plasma operating at 900 W for O2 pressures of 126 Pa. The measured atomic oxygen recombination coefficients on quartz and chemically polished aluminum alloy (ALpika®) surfaces were 1.94×10−4 and 3.75×10−3, respectively.
