Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
真空排気と水
齊藤 芳男
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ジャーナル フリー

2010 年 53 巻 9 号 p. 511-514

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抄録
  Some historical background concerning studies on residual water molecules in vacuum chambers and devices are introduced. The effect of adsorbed water molecules on pumping process in initial and steady state is outlined. Pumping delay time due to sojourn time of the molecule is also discussed.
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© 2010 一般社団法人日本真空学会
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