Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
シンクロトロン放射 X 線を用いたマイクロ CT の現状
鈴木 芳生竹内 晃久上杉 健太朗
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ジャーナル フリー

2011 年 54 巻 1 号 p. 47-55

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抄録
  Computer tomography is a method for reconstructing three-dimensional structure from a series of projection images. By using high brilliance synchrotron radiation X-ray sources and modern X-ray optical systems, high-resolution X-ray tomographic imaging with spatial resolution of micrometer-nanometer has been developed and is currently open to public user experiments. The applications of synchrotron radiation microtomography are spread in various field of science and engineering. In this review article, present status of high-resolution tomography at the Synchrotron Radiation Facility SPring-8 is described. Theoretical limitation of spatial resolution by diffraction of X-rays, and high-resolution tomography with X-ray imaging microscope are also shown.
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© 2011 一般社団法人日本真空学会
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