Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Review
Combinatorial Thin Film Synthesis and its High Throughput Screening for Inorganic Functional Materials
Tetsuya HASEGAWATomoteru FUKUMURA
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2011 Volume 54 Issue 11 Pages 549-558

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Abstract
  Combinatorial approach toward discovery of new functional materials and properties is a powerful method in fields of material science, because such approach can considerably decrease the time consumption for the discovery. Here, we focus on the combinaotorial approach to inorganic functional materials such as oxides, and review various studies on combinatorial thin film synthesis and high throughput screening techniques of structural, electric, magnetic, and optical properties.
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© 2011 The Vacuum Society of Japan
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