抄録
Combinatorial sputter coating system has been developed for optimizing crystal preferred orientation of coating films. It can synthesize various kinds of coatings under precisely controlled conditions such as sputter-gas, gas pressure, gas partial pressure, r.f. power, substrate temperature, distance between substrates and targets, etc. With this system we successfully synthesized zinc oxide coatings with different crystal-preferred orientations, and very low frictional property was obtained by optimizing the crystal preferred orientation.
