抄録
Several types of simple non-evaporable getter (NEG) assemblies have been constructed using a commercial St 707 strip or a St 172 module. Each assembly is mounted on a conflat flange with an outer diameter of 203, 70, or 34 mm (CF203, CF70, and CF34, respectively) and can be activated by direct current heating. The pumping speeds of the three NEG assemblies (the CF70-mount type using a St 707 strip, the CF70-mount type using a St 172 module, and the CF152-mount type using a St 707 strip) have been measured for N2 and H2 gasses at 20℃. The maximum pumping speeds for the three types of NEG assemblies were 4.8, 1.2, and 25 L s−1 (8.0, 3.6, and 82 L s−1) for N2 (H2), respectively. These NEG assemblies are useful for laboratory ultrahigh vacuum systems as well as vacuum ultraviolet/soft-X-ray beamlines in synchrotron radiation facilities.
