The surface analysis techniques such as Auger Electron Spectroscopy, X-ray Photoelectron Spectroscopy, and Secondary Ion Mass Spectrometry are now widely used in many industries, and it becomes important to know the basic concept of these techniques for scientists and engineers. When electron, X-ray, or ion is irradiated on solid surfaces, electron, X-ray, or ion is generated, or is reflected by the interactions with solid surfaces. Surface analysis is the technique that detects these signals, and deduces the surface properties of solids by analyzing detected signals. The objective of this lecture is to introduce the basis of surface analysis techniques. In this lecture, the interactions between probes (electron, X-ray, or ion) and solids will be briefly introduced, and then the way to utilize these interactions as surface analysis techniques will be explained.
