抄録
In this study, a remarkable feature of the method that fabricates Titanium-Doped Zinc Oxide (TZO) films is used to deposit films in a magnetic field caused by the rare earth magnet, NdFeB arranged between the target and substrate. The magnetic field is applied perpendicular to the plume. As a result, the resistivity of the films fabricated in the magnetic field decreased from 1.26×10−3 to 6.99×10−4 Ω•cm. Furthermore, the average transmittance in the visible wavelength region (400-700 nm) increased from 77.0% to 81.3%, and that in the wavelength region applicable to the tandem type solar cells (400-1500 nm) increased from 84.2% to 85.5% for the films fabricated in the magnetic field. Furthermore, an average transmittance in the wavelength region corresponding to the whole solar spectra (400-2500 nm) was 71.4%.
