抄録
MEMS (Micro Electro Mechanical Systems) are an important technological field that is expected as a small-sized, energy-saving and high-performance key device. However, since development of MEMS requires considerable expenses and time, reduction of the testing expense, shortening of the development period and improvement of the yield ratio are expected with use of a simulator. Although leading MEMS foundries have begun to utilize simulators made abroad, purely domestic “Computer Aided Engineering System for Micro Electro-Mechanical Systems (MemsONE)” developed in a national project have come into use recently.
