抄録
Synchrotron radiation, which has characteristics of high energy, high brilliance, high directionality, and high polarization, is a useful light source for the evaluation of thin film. International standardization project of diamond-like carbon (DLC) film is proceeding on the basis of the measurement of the near edge X-ray absorption fine structure (NEXAFS) spectroscopy using synchrotron radiation. NEXAFS has been utilized as a precise method of sp2 content for DLC films. The sp2 content can be extracted from the NEXAFS spectrum with a high sensitivity and a high quantitativity, because the isolated peak corresponding to carbon 1s→π* resonance transition can be observed.
