抄録
Recent standardization activities on data treatment and management for scanning probe microscopy (SPM), performed in ISO TC 201, are reviewed. International Standard ISO 28600 on standard data transfer format for SPM is introduced. The data conversion software compatible with ISO 28600 will facilitate inter-exchangeability and consistent treatment of data, enhance productivity of data-processing programs, and increase accuracy and quantification. Once the data format has been standardized, the focus should shift to standardizing data-processing procedures such as drift correction, probe-tip characterization, and image restoration. To make SPMs reliable tools for nanometrology, standardization of quantitative image restoration is necessary. A solution relying on mathematical morphology is introduced to reduce artifacts caused by probe shape. The use of well-characterized probes with known probe shapes is critical to accurate reconstruction of topography images. Our final goal is establishment of a comprehensive SPM database integrated with a common data-processing environment.
