Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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電界放射顕微鏡および走査プローブ顕微鏡による電子源の評価
渡邉 騎通田中 深幸清水 哲夫
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2015 年 58 巻 4 号 p. 131-133

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  Field emission microscopy (FEM) is commonly used to observe patterns and intensities of electron emissions and to estimate the average work function from the emission current with respect to the applied voltage (F-N plots). However, it is difficult to observe the nanostructure at the apex of the tip using only field emission microscopy. In this research, we observed the nanostructure of a single crystal tungsten 〈100〉 electron emitter covered with barium aluminate by using scanning probe microscopy (SPM). We were able to observe the terrace structure at the top of single crystal tungsten 〈100〉 electron emitter tip. Furthermore, we investigated the correlation between field emission pattern by the FEM and nanostructure of the electron emitter tip by the SPM.

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© 2015 一般社団法人日本真空学会
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