Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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ガスシートを用いた電子ビームの検出
荻原 徳男引地 裕輔神谷 潤一郎金正 倫計
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2016 年 59 巻 4 号 p. 79-82

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 To demonstrate the function of a gas sheet for measuring the 2D profiles of accelerated beams, the following experiments were performed: 1) A gas sheet with a thickness of 1.5 mm and a density of 2×10−4 Pa was produced by the deep slit, and the shape of the sheet was improved by the thin slit. 2) For an electron beam of 30 keV and a diameter greater than 0.35 mm, the position and the 2D profiles were appropriately measured using the gas sheet.

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