Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Review
Visualization of Localized Field Using Deflection of Low-Energy Electron Beam with SEM/STEM
Jun-ichi FUJITA
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2017 Volume 60 Issue 10 Pages 397-405

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Abstract
 High-sensitive visualization of the local electric and magnetic field is possible using a low energy electron beam combining with a simple grid detector configuration. The beam deflection goes along with the clear principle that the larger deflection can be induced by lower energy electron based on the Rutherford scattering scheme. The field distribution around two-dimensional materials allows quantitative analysis of the local field, showing good agreements with FEM simulation. Well defined beam scanning control established in the recent scanning electron microscope (SEM) can project the detector grid image superimposed on the specimen image. And thus the localized field distribution was easily visualized through a simple E-filed vector translation based on the deflection configuration. Detailed techniques and the analysis were described from the viewpoint of practical applications.
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© 2017 The Vacuum Society of Japan
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