Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
ダイヤモンド・ライク・カーボン(DLC)膜とその応用展開
三宅 浩二
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ジャーナル フリー

2017 年 60 巻 11 号 p. 428-436

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抄録
 Diamond Like Carbon (DLC) films have several unique characteristics, high-hardness, wear resistances, low friction, and good chemical stability. Thus, their applications are widely spread, for example, automotive and mechanical sliding parts, cutting tools, and molding dies.
 In this paper, we describe their deposition processes, film structures, characteristics and mechanical properties, and their applications. Finally, we mention some recent developments and possibilities.
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© 2017 一般社団法人日本真空学会
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