真空部品向け溶射・再生表面処理技術

抄録

　Thermal spraying technique is often applied to inner parts used for vacuum equipment. Sprayed films have the property to prevent separation of films deposited over inner parts, which in turn prevents dust generation in vacuum equipment and ensures stable operations of vacuum equipment for longer period. Inner parts of vacuum equipment is also subject to a number of surface treatment processes other than thermal spraying before incorporated into vacuum equipment. This article describes surface treatment technologies used for the inner parts of vacuum equipment.