Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2019
Session ID : 1Ba00
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Introductory talk ∼Forefront of semiconductor manufacturing∼
*Shinichi Sekiguchi
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

The semiconductor industry has continued to achieve high economic growth due to device price reductions as a result of die shrink and larger diameter wafers. Although the progress of die shrink has been slowing down somewhat, research and development are tackling various fields for further growth and development.In this symposium, we plan lectures given by prominent researchers in the field of fine processing and measurement technology to support the future development of semiconductors and their related industries. We expect lively discussions on future research trends in semiconductor manufacturing and on the directions to aim for.

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© 2019 The Japan Society of Vacuum and Surface Science
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