Host: The Japan Society of Vacuum and Surface Science
The semiconductor industry has continued to achieve high economic growth due to device price reductions as a result of die shrink and larger diameter wafers. Although the progress of die shrink has been slowing down somewhat, research and development are tackling various fields for further growth and development.In this symposium, we plan lectures given by prominent researchers in the field of fine processing and measurement technology to support the future development of semiconductors and their related industries. We expect lively discussions on future research trends in semiconductor manufacturing and on the directions to aim for.
