Nanoscale analyses of corrosion of copper fine wires by in-liquid surface potential measurement technique

Abstract

We have developed a nanoscale local surface potential measurement technique referred to as open-loop electric potential microscopy (OL-EPM) based on atomic force microscopy (AFM). In this study, we directly visualize time-dependent changes of the local distribution of the corrosion cells under the liquid-environment mimicking the solution condition for the chemical mechanical polishing (CPM) process.