Growth of graphene by plasma-enhanced chemical vapor deposition and ellipsometric monitoring of first stages

Abstract

We synthesized graphene by magnetron-plasma-enhanced chemical vapor deposition and analyzed its growth stages by using in-situ ellipsometry. It was observed that the growth form and nuclei density of graphene differ depending on substrate materials. Experiments of the control of first stages of graphene growth on silicon dioxide through in-situ ellipsometry monitoring of the surface is being carried out to grow highly crystalline graphene.