Surface structure analysis of micropatterned Si(110) by nano-beam Weissenberg Reflection High-Energy Electron Diffraction

Abstract

It is important to understand the surface of micro- or nano-domains that we can see abundantly in nanotechnology. We have developed a technique to analyze the surface structure of such small domains, combining the scanning electron microscope and the Weissenberg Reflection High-Energy Electron Diffraction. In order to demonstrate the method, we prepared the two types of grating-like structures on Si(110) substrates by photolithography and etching. As the result of observation of diffraction patterns, we have found the changes of structures. There are two equivalent rectangular unit cells on Si(110), however, one of the two orientations was dominantly observed near the edge of the top surfaces and bottoms. Also, it is found there are micro-slopes at the edges of grating-like structures.