Development of elemental analysis in thin film by using total reflection neutron beam

Abstract

Total reflection X-ray fluorescence analysis is used for elemental analysis in a thin film. Similar to this idea, we are developing a total reflection neutron ray gamma ray analysis method (Total-reflection Neutron activated Gamma spectroscopy, TN-γ method). Along with the measurement of neutron reflectivity, gamma rays generated in the nuclear reaction of neutrons are analyzed by a semiconductor detector. It enables analysis of light elements that are difficult with fluorescent X-rays.