Soft X-Ray Absorption Spectral Measurements of Polyester Films by using the Transmission and Total-Electron-Yield Modes

Abstract

Soft X-ray absorption spectra of 750-nm thick polyester films were measured with the transmission and total electron yield (TEY) methods. In the OK region, OK-XANES were successfully measured with the transmission mode, because soft X-rays can sufficiently transmit the 750-nm thick films. However, in the CK region, CK-XANES exhibited saturated profiles, because soft X-rays cannot sufficiently transmit the films.