Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2019
Session ID : 2P06
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Study of the effect of methane concentration and substrate misorientation on the homoepitaxial growth on (111) diamond
*Osamu MaidaDaisuke KanemotoTetsuya Hirose
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Abstract

Diamond is expected as a potential material for high-power and high-frequency devices in the next generation. In this study, we investigated the effects of substrate misorientation and methane concentration on the homoepitaxial (111) diamond growth by microwave-plasma chemical vapor deposition method. It was founded that surface roughness and crystal quality of the diamond films were improved by the homoepitaxial growth with a methane concentration of 0.5% on the substrate with a misorientaion tilted along the <112-> direction.

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© 2019 The Japan Society of Vacuum and Surface Science
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